Depth profile analysis with monolayer resolution using elastic recoil detection (ERD)

Author： Dollinger G. Frey C. M. Bergmaier A. Faestermann T.

E-ISSN： 1286-4854|42|1|25-30

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.42, Iss.1, 2010-03, pp. : 25-30

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Abstract

The conditions for obtaining optimum depth resolution in elastic recoil detection (ERD) analysis of thin films using high-energy heavy ions are investigated. We estimate the principle limits given by energy straggling and small-angle scattering effects and show that monolayer depth resolution can be expected under optimized experimental conditions. Such a resolution is demonstrated in an ERD experiment for the first time by discrete signals of adjacent (002) graphite layers which is obtained using a 60 MeV $\rm {}^{127}I^{23+}$ ion beam anddetecting $\rm {}^{12}C^{5+}$ recoils with a magnetic spectrograph.