Author： Dollinger G. Frey C. M. Bergmaier A. Faestermann T.
Publisher： Edp Sciences
E-ISSN： 1286-4854|42|1|25-30
ISSN： 0295-5075
Source： EPL (EUROPHYSICS LETTERS), Vol.42, Iss.1, 2010-03, pp. : 25-30
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
The conditions for obtaining optimum depth resolution in elastic recoil detection (ERD) analysis of thin films using high-energy heavy ions are investigated. We estimate the principle limits given by energy straggling and small-angle scattering effects and show that monolayer depth resolution can be expected under optimized experimental conditions. Such a resolution is demonstrated in an ERD experiment for the first time by discrete signals of adjacent (002) graphite layers which is obtained using a 60 MeV
Related content
By De La Paliza G. Espeso-Gil O. Sajavaara T. Cabrera J. M. Climent-Font A. García G. Agulló-López F.
Ferroelectrics, Vol. 269, Iss. 1, 2002-01 ,pp. :
Access to resources
Recommend
High depth resolution SIMS analysis using metal cluster complex ion bombardment
Journal of Physics: Conference Series , Vol. 100, Iss. 1, 2008-03 ,pp. :
Access to resources