High-quality indium tin oxide films prepared at room temperature by oxygen ion beam assisted deposition

Author： Liu C.   Matsutani T.   Yamamoto N.   Kiuchi M.  

Publisher： Edp Sciences

E-ISSN： 1286-4854|59|4|606-611

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.59, Iss.4, 2010-03, pp. : 606-611

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