Thermodynamic study and preparation of Si–B–N ceramic coating by LPCVD from SiCl4–NH3–BCl3–H2–Ar system

Publisher: Cambridge University Press

E-ISSN: 2044-5326|32|20|3801-3810

ISSN: 0884-2914

Source: Journal of Materials Research, Vol.32, Iss.20, 2017-08, pp. : 3801-3810

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Abstract