大直径硅片微区电阻率的表征 Characteristics for Resistivity in Micro-Areas on Large-Scale Silicon Slices

Author: 孙冰   齐景爱   高金雍   张秀军  

Publisher: 汉斯出版社

ISSN: 2326-3520

Source: Advances in Condensed Matter Physics, Vol.02, Iss.01, 2013-02, pp. : 5-11

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Abstract