Laser Induced Stress Wave Thermometry for In-Situ Temperature and Thickness Characterization of Single Crystalline Silicon Wafer Part II - Experimental Results

Author： Vedantham V.  

Publisher： Springer Publishing Company

ISSN： 0014-4851

Source： Experimental Mechanics, Vol.51, Iss.7, 2011-09, pp. : 1115-1122

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