Thin molybdenum oxide films produced by molybdenum pentacarbonyl 1-methylbutylisonitrile with plasma-assisted chemical vapor deposition

Author： Hamelmann F.   Brechling A.   Aschentrup A.   Heinzmann U.   Jutzi P.   Sandrock J.   Siemeling U.   Ivanova T.   Szekeres A.   Gesheva K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.446, Iss.2, 2004-01, pp. : 167-171

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