Round pinholes in indium-tin-oxide thin films on the glass substrates: a Taguchi method analysis and theoretical approach to their origins

Author： Lee H.-C. Park O.O.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.72, Iss.4, 2004-01, pp. : 411-418

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Pinholes in Al thin films: their effects on TFT characteristics and a taguchi method analysis of their origins

By Takatsuji H. Arai T.

Vacuum, Vol. 59, Iss. 2, 2000-11 ,pp. : 606-613

Elsevier

Access to resources Recommend Favorite

Indium-tin-oxide thin films prepared by dip-coating of indium diacetate monohydroxide and tin dichloride

By Seki S. Sawada Y. Nishide T.

Thin Solid Films, Vol. 388, Iss. 1, 2001-06 ,pp. : 22-26

Elsevier

Access to resources Recommend Favorite

Crystallization and electrical property change on the annealing of amorphous indium-oxide and indium-tin-oxide thin films

By Morikawa H. Fujita M.

Thin Solid Films, Vol. 359, Iss. 1, 2000-01 ,pp. : 61-67

Elsevier

Access to resources Recommend Favorite

Growth of In x Ga 1-x N thin films on indium tin oxide/glass substrates by RF plasma enhanced chemical vapor deposition

By Park D.-C. Ko H.-C. Fujita S. Fujita S.

Thin Solid Films, Vol. 338, Iss. 1, 1999-01 ,pp. : 9-12

Elsevier

Access to resources Recommend Favorite

Reactive thermal deposition of indium oxide and tin-doped indium oxide thin films on InP substrates

By Thilakan P. Kumar J.

Thin Solid Films, Vol. 292, Iss. 1, 1997-01 ,pp. : 50-54

Elsevier

Access to resources Recommend Favorite