Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder

Author: Gao W.   Araki T.   Kiyono S.   Okazaki Y.   Yamanaka M.  

Publisher: Elsevier

ISSN: 0141-6359

Source: Precision Engineering, Vol.27, Iss.3, 2003-07, pp. : 289-298

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