Silicide formation of Au thin films on (100) Si during annealing

Author: Chang J.F.   Young T.F.   Yang Y.L.   Ueng H.Y.   Chang T.C.  

Publisher: Elsevier

ISSN: 0254-0584

Source: Materials Chemistry and Physics, Vol.83, Iss.2, 2004-02, pp. : 199-203

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