Standard sample for calibration of transmission electron microscopes nanometrology

Author： Bodunov D.  

Publisher： Springer Publishing Company

ISSN： 0543-1972

Source： Measurement Techniques, Vol.55, Iss.10, 2013-01, pp. : 1137-1140

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Abstract

A prototype standard sample GSO 10030-2011 for the stepped parameters of thin layers of single crystal silicon is developed and certified. It is intended for calibration of transmission electron microscopes at magnifications of 1000-1,500,000×. The certified parameters are the step size of the stepped structure and the distance between the (111) planes of the single crystal silicon in this material. Both parameters are independently traceable to the unit of length, the meter.

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