Analysis of organic contaminants on Si wafers with TXRF-NEXAFS

Author： Pepponi G. Beckhoff B. Ehmann T. Ulm G. Streli C. Fabry L. Pahlke S. Wobrauschek P.

Publisher： Elsevier

ISSN： 0584-8547

Source： Spectrochimica Acta Part B: Atomic Spectroscopy, Vol.58, Iss.12, 2003-12, pp. : 2245-2253

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