Nickel precipitation in large-diameter Czochralski silicon

Author: Xi Z.   Yang D.   Chen J.   Que D.   Moeller H.J.  

Publisher: Elsevier

ISSN: 0921-4526

Source: Physica B, Vol.344, Iss.1, 2004-02, pp. : 407-412

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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