Modeling the extraction of sputtered metal from high power impulse hollow cathode discharges

Author： Hasan M.I.   Pilch I.   Söderström D.   Lundin D.   Helmersson U.   Brenning N.  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.3, 2013-06, pp. : 35006-35017

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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