Effect of STI-induced mechanical stress on leakage current in deep submicron CMOS devices

Author: Rui Li   Liu-Jiang Yu   Ye-Min Dong   Ching-Dong Wang  

Publisher: IOP Publishing

ISSN: 1009-1963

Source: Chinese Physics, Vol.16, Iss.10, 2007-10, pp. : 3104-3107

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Abstract