Dependence of the self-sputtering yield upon ion incidence angle

Author: Tolmachev A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1027-4510

Source: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.2, 2011-04, pp. : 288-290

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Abstract