Erosion of polyimide modified by amorphous silica sol in the stream of oxygen plasma

Author： Vernigorov K. Alent'ev A. Muzafarov A. Novikov L. Chernik V.

ISSN： 1027-4510

Source： Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.2, 2011-04, pp. : 263-268

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