Author： Savel'ev I. Savel'ev S.
Publisher： MAIK Nauka/Interperiodica
ISSN： 1027-4510
Source： Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Vol.5, Iss.3, 2011-06, pp. : 529-532
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Abstract
A computer-aided machining (CAM) system for nanoscale polishing of cylindrical optical elements with a flat, parabolic, elliptic, or table-defined generatrix we developed is described. This system is one of the key components of the fabrication of templates for producing substrates of 2D optical systems based on multilayer interference structures. The field of application of this software can be easily extended to production of various 3D surfaces.
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