Self-Propagating High-Temperature Synthesis of Functionally Graded PVD Targets with a Ceramic Working Layer of TiB 2 -TiN or Ti 5 Si 3 -TiN

Author： Levashov E.A.  

Publisher： Springer Publishing Company

ISSN： 1064-7562

Source： Journal of Materials Synthesis and Processing, Vol.10, Iss.6, 2002-11, pp. : 319-330

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