Antimony dopant redistribution during copper silicide formation

Author： Benkerri M.   Halimi R.   Bouabellou A.   Mosser A.   Sens J.P.  

Publisher： Elsevier

ISSN： 1466-6049

Source： The International Journal of Inorganic Materials, Vol.3, Iss.8, 2001-12, pp. : 1299-1301

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