Enhancement of Co Nucleation on the TaN x Film Surface in Co MOCVD

Author: Park Jae-Hyung   Moon Dae-Yong   Han Dong-Suk   Shin So-Ra   Park Jong-Wan  

Publisher: American Scientific Publishers

ISSN: 1533-4899

Source: Journal of Nanoscience and Nanotechnology, Vol.13, Iss.10, 2013-10, pp. : 7142-7144

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Abstract