Analysis of the Actuation of an RF-MEMS by Means of Digital Holography

Author： Coppola Giuseppe   Striano Valerio   De Nicola Sergio   Finizio Andrea   Ferraro Pietro  

Publisher： American Scientific Publishers

ISSN： 1546-9018

Source： Journal of Holography and Speckle, Vol.5, Iss.2, 2009-08, pp. : 175-179

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