Modular Family of Sensors for a Nanopositioning and Nanomeasuring Machine

Author: Manske Eberhard  

Publisher: Taylor & Francis Ltd

ISSN: 1559-9612

Source: International Journal of Optomechatronics, Vol.7, Iss.2, 2013-04, pp. : 122-135

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract