Mechanism of amorphous Ge 2 Sb 2 Te 5 removal during chemical mechanical planarization in acidic H 2 O 2 slurry

Author： Ao-Dong He Zhi-Tang Song Bo Liu Min Zhong Liang-Yong Wang Ye-Gang Lü Song-Lin Feng

ISSN： 1674-1056

Source： Chinese Physics B, Vol.22, Iss.1, 2013-01, pp. : 18503-18507

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