Author： Cakici E. Mason S. J.
Publisher： Taylor & Francis Ltd
ISSN： 1366-5871
Source： Production Planning and Control, Vol.18, Iss.3, 2007-04, pp. : 217-225
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Abstract
This paper is motivated by scheduling photolithography machines in semiconductor manufacturing wherein reticle requirements are the auxiliary resource constraints. As the problem is NP hard, two different heuristic solution approaches are developed. The performance of our network-based mathematical model and heuristics are evaluated through an extensive set of problem instances. The best performing heuristic method typically produces solutions that are 1.72% above optimal. If this method is used as the seed solution for a Tabu search-based post processing algorithm, schedules that are 0.78% above the optimal solution, on average, are possible.
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