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Automated post bonding inspection by using machine vision techniques

Author: Wang M-J. J.   Wu W-Y.   Hsu C-C.  

Publisher: Taylor & Francis Ltd

ISSN: 0020-7543

Source: International Journal of Production Research, Vol.40, Iss.12, 2002-08, pp. : 2835-2848

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract

Inspection plays an important role in the semiconductor industry. In this paper, we focus on the inspection task after wire bonding in packaging. The purpose of wire bonding (W/B) is to connect the bond pads with the lead fingers. Two major types of defects are (1) bonding line missing and (2) bonding line breakage. The numbers of bonding lines and bonding balls are used as the features for defect classification. The proposed method consists of image preprocessing, orientation determination, connection detection, bonding line detection, bonding ball detection, and defect classification. The proposed method is simple and fast. The experimental results show that the proposed method can detect the defects effectively.