High-Performance Liquid Chromatographic Method of Photoactive Compounds Based on Diazonaphthoquinone for Positive Photoresists

Author: Kim Byoung-Hyoun   Kim Yon Hee   Moon Dong Cheul  

Publisher: Oxford University Press

ISSN: 0021-9665

Source: Journal of Chromatographic Science, Vol.51, Iss.2, 2013-02, pp. : 161-165

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