Thickness control of InP and In 0.53 Ga 0.47 As thin films by energy-dispersive X-ray spectrometry

Author: Peiner E.   Hansen K.   Schlachetzki A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.256, Iss.1, 1995-02, pp. : 143-147

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