High damage threshold Al 2 O 3 /SiO 2 dielectric coatings for excimer lasers

Author: Kaiser N.   Uhlig H.   Schallenberg U.B.   Kaiser U.   Mann K.   Eva E.   Anton B.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.260, Iss.1, 1995-05, pp. : 86-92

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Abstract