Crystallization of amorphous silicon by NiSi 2 precipitates

Author: Schoenfeld O.   Zhao X.   Aoyagi Y.   Hempel T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.261, Iss.1, 1995-06, pp. : 236-240

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Abstract