CVD of copper using copper(I) and copper(II) -diketonates

Author： Gill W.N.   Naik M.B.   Wentorf R.H.   Reeves R.R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.262, Iss.1, 1995-06, pp. : 60-66

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