Determination of limits in deposition of adhering a-C films on silicon produced by pulsed laser deposition

Author： Zehnder T. Balmer J. Luthy W. Weber H.P. Luthy W.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.263, Iss.2, 1995-07, pp. : 198-202

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