Artifacts in SPM measurements of thin films and coatings

Author: Lenihan T.G.   Malshe A.P.   Brown W.D.   Schaper L.W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.270, Iss.1, 1995-12, pp. : 356-361

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Abstract