Oxidation behavior of Al&unknown;W alloy films deposited on Cu as a passivation layer

Author: Takeyama M.   Ichikawa T.   Noya A.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.272, Iss.1, 1996-01, pp. : 18-20

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Abstract