AFM microlithography of a thin chromium film covered with a thin resist Langmuir-Blodgett (LB) film

Author: Takano H.   Fujihira M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.273, Iss.1, 1996-02, pp. : 312-316

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Abstract