Thermal nitridation of p-type porous silicon in ammonia

Author: Morazzani V.   Cantin J.L.   Ortega C.   Pajot B.   Rahbi R.   Von Bardeleben H.J.   Rosenbauer M.   Vazsonyi E.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.276, Iss.1, 1996-04, pp. : 32-35

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Abstract