Characterization of unintentionally or lightly doped polysilicon films by improved Hall effect measurements

Author: Le Bihan F.   Fortin B.   Cauneau S.   Briand D.   Bonnaud O.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.301, Iss.1, 1997-06, pp. : 230-235

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract