Comparative study of the elastic properties of polycrystalline aluminum nitride films on silicon by Brillouin light scattering

Author： Carlotti G. Gubbiotti G. Socino G. Hickernell F.S. Liaw H.M.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.310, Iss.1, 1997-11, pp. : 34-38

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