MgO by Injection CVD

Author： Abrutis A.   Kubilius V.   Teiserskis A.   Bigelyte V.   Galindo V.   Weiss F.   Senateur J.P.   Vengalis B.   Jukna A.   Butkute R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.311, Iss.1, 1997-12, pp. : 251-258

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