Generation of non-equilibrium plasma at atmospheric pressure and application for chemical process

Author： Sugiyama K.   Kiyokawa K.   Matsuoka H.   Itou A.   Hasegawa K.   Tsutsumi K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.316, Iss.1, 1998-03, pp. : 117-122

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