High-rate deposition of LiNbO 3 films by thermal plasma spray CVD

Author: Yamaguchi N.   Hattori T.   Terashima K.   Yoshida T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.316, Iss.1, 1998-03, pp. : 185-188

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Abstract