Author: Koide M. Horiuchi T. Inushima T. Lee B.J. Tobayama M. Koinuma H.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.316, Iss.1, 1998-03, pp. : 65-67
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Production of low electron temperature ECR plasma for plasma processing
By Itagaki N. Ueda Y. Ishii N. Kawai Y.
Thin Solid Films, Vol. 390, Iss. 1, 2001-06 ,pp. :
High thermal efficiency-type laminar plasma jet generator for plasma processing
By Osaki K. Fukumasa O. Kobayashi A.
Vacuum, Vol. 59, Iss. 1, 2000-10 ,pp. :
Plasma spraying of stainless-steel particles coated with an alumina shell
Thin Solid Films, Vol. 370, Iss. 1, 2000-07 ,pp. :
Integrated synthesis of AMTEC electrode by using controlled thermal plasma processing
By Mukunoki H. Fukumasa O. Sakiyama S.
Thin Solid Films, Vol. 407, Iss. 1, 2002-03 ,pp. :