A novel low temperature plasma generator with alumina coated electrode for open air material processing

Author: Koide M.   Horiuchi T.   Inushima T.   Lee B.J.   Tobayama M.   Koinuma H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.316, Iss.1, 1998-03, pp. : 65-67

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Abstract