Thin tantalum oxide films prepared by 172 nm Excimer lamp irradiation using sol-gel method

Author: Zhang J.-Y.   Bie L.-J.   Dusastre V.   Boyd I.W.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.318, Iss.1, 1998-04, pp. : 252-256

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Abstract