TEM observation of structural differences between two types of Ni silicide/Si thin films caused by FIB irradiation

Author: Tanaka M.   Furuya K.   Saito T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.319, Iss.1, 1998-04, pp. : 101-105

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Abstract