Electrode-width dependence of resistivity and structure of aluminum electrode thin film electron beam evaporated on lithium tantalate

Author： Noguchi K.   Nakai H.   Ohashi H.   Hashimoto M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.319, Iss.1, 1998-04, pp. : 128-131

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