Effect of implantation oxide on the Ti- and Co-silicidation of narrow diffusion and poly-lines

Author： Lauwers A.   Naem A.   de Potter M.   Maex K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.320, Iss.1, 1998-05, pp. : 122-127

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