Supersonic jet epitaxy of single crystalline cubic SiC thin films on Si substrates from t-Butyldimethylsilane

Author： Boo J.-H.   Ustin S.A.   Ho W.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.324, Iss.1, 1998-07, pp. : 124-128

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