XPS characterization and optical properties of Si/SiO 2 , Si/Al 2 O 3 and Si/MgO co-sputtered films

Author： Koshizaki N.   Umehara H.   Oyama T.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.325, Iss.1, 1998-07, pp. : 130-136

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