Author: Belousov I. Rudenko E. Linzen S. Seidel P.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.325, Iss.1, 1998-07, pp. : 145-150
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Silicide formation in cobalt/amorphous silicon, amorphous Co-Si and bias-induced Co-Si films
By Shim J.Y. Park S.W. Baik H.K.
Thin Solid Films, Vol. 292, Iss. 1, 1997-01 ,pp. :
Characterization of buried cobalt silicide layers in Si by MEVVA implantation
By Peng Q. Wong S.P. Wilson I.H. Wang N. Fung K.K.
Thin Solid Films, Vol. 270, Iss. 1, 1995-12 ,pp. :
Sputtered Ohmic Cobalt Silicide Contacts to 4H-SiC
Materials Science Forum, Vol. 2015, Iss. 821, 2015-07 ,pp. :