Local nucleation and lateral crystallization of silicide cobalt phases at interaction of cobalt film with silicon surface

Author: Belousov I.   Rudenko E.   Linzen S.   Seidel P.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.325, Iss.1, 1998-07, pp. : 145-150

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Abstract