Dependence of oxygen flow on optical and electrical properties of DC-magnetron sputtered ITO films

Author： Bender M.   Seelig W.   Daube C.   Frankenberger H.   Ocker B.   Stollenwerk J.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.326, Iss.1, 1998-08, pp. : 72-77

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