The effect of sol viscosity on the sol-gel derived low density SiO 2 xerogel film for intermetal dielectric application

Author: Hong J.-K.   Kim H.-R.   Park H.-H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.332, Iss.1, 1998-11, pp. : 449-454

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Abstract